Horizon 2020 Pillars
Piezo MEMS group – Ceramics Laboratory of EPFL
The ceramics laboratory is centred on ferroelectric and multifunctional materials, ranging from fundamental to applied aspects, including theory, modelling, functional and structural characterisation, and processing. The piezo-MEMS group is focused on piezoelectric thin films and their applications in micro and nano systems. Very advanced competences are established in ferroelectric PZT thin films and polar (Al,Sc)N thin films. Further research areas are in selected topics of micro solid fuel cells.
- Profile in Horizon2020 Projects Portal – Issue 5
- Profile in Pan European Networks Science & Technology – Issue 13
- Profile in Pan European Networks Science & Technology – Issue 12
- Profile in Pan European Networks Science & Technology – Issue 5
- Profile on Horizon2020projects.com – December 2013
- Piezoelectric MEMS for fluidic applications
- Ultrasonic wave transducers based on piezoelectric thin films
- Reliability and electrode issues for ferroelectric thin film devices
- Memory applications of ferreoelectrics
- Electrochemical phenomena of polar oxides
- Micro solid oxide fuel cells
Prof Paul Muralt
+41 2169 34957
Piezo MEMS group – Ceramics Laboratory of EPFL
Ecole Polytechnique Federale de Lausanne
STI-IMX-LC
Station 12
CH 1015 Lausanne
Switzerland